Friday, November 24, 2017
Mini Environment EFEM System

 

      Mini Environment EFEM System

 


Features
Microcontrol EFEM, Equipment Front End Module, is an interface that can be integrated with any process equipment
Completely built and assemblied by Microcontrol Electronic Italy
Easy and cost effective software interface
Thanks to the action of HEPA or ULPA filters keeps 300 mm wafers at the same cleanliness inside FOUP
Supplied with a reliable mapping system and contactless centering and aligning station


System appearance and specifications are subject to change without prior notice

Realizzato da: EffemmedueSrl