Mwe 300 Fully automatic 300mm UV curing system
Operator Inteface
UV Lamp
System appearance and specifications are subject to change without prior notice
Robot arm handling Servo controlled step motor movements for arm and lift No wafer prealignment required Arm surface with special treatmen
Automatic and process In automatic mode a recalled program is continuously executed to process wafer cassette In process mode the process can be tuned to define the best exposure time and handling parameters for each wafer type Diagnostic system with clear error messages Service function to allow easy calibration and setup
SPECIFICATIONS
