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Features |
Fully automated system loading 4", 5", 6" wafers without any mechanical setting on standard microscopes
Flat alignment not required
Beltless transportation, low particle generation through minimal handling
Wafers are automatically returned to the original slot
All functions are easily programmable by control panel and readable on LCD
Smallest footprint
Best ratio price/features
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POWER |
AC 110/220 V - 50 Hz - 150 VA |
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VACUUM |
100 Torr |
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WEIGHT |
13 Kg |
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SIZE |
530 mm (L) - 300 mm (W) - 245 mm (H) |
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WAFER SIZE
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4", 5", 6" - Recipe Linked
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CHUCK |
Vacuum assisted - rotating 360°
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WAFER CARRIER |
25 slots std 3/16" pitch cassette
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TRANSPORT CYCLE |
less than 3 secs
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TRANSFERT SYSTEM
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Teflon coated robotic arm
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REJECT WAFER
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Manually by "fault switch button"
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