Wednesday, July 26, 2017
LP100

 

        LP100


System appearance and specifications are subject to change without prior notice


Features
Best price & performance on the market
Cost free integration through industrial standard communication protocols
Costumized configurations

WAFER SIZE UP TO 300 MM
OPERATING RANGE
THETA-AXIS (JOINT1) (DEG)
355
Z-AXIS (JOINT2) (MM) 400
R-AXIS (JOINT3) (MM) 180-180
REPEATABILITY
THETA-AXIS (DEG)
0.01+-
Z-AXIS (MM) 0.01+-
R-AXIS (MM) 0.01+-
RESOLUTION
THETA-AXIS (DEG)
0.0001 per encoder count
Z-AXIS (MM) 0.000007629 per encoder count
R-AXIS (MM) 0.0001 per encoder count
LOAD CAPACITY (kg) 1.5
CLEANROOM RATING class 1
WEIGHT
Robot without options (kg)
49
WAFER MAPPING option
END EFFECTOR option
LINEAR AXIS option
Realizzato da: EffemmedueSrl