Wafer Sorter
State of art, fully automatic Wafer sorting system.
The Leonardo WS can be delivered with different specific configurations to meet every customer request with a special focus on the handling of thin and warp wafers.
FEATURES
- Available for all wafer size
- Open cassette platform
- 200 mm SMIF cassette opener (option)
- 300 mm load port (option)
- E84 full compliance
- SECS/GEM host communication full compliance
- Edge contact wafer handling (option)
- Edge contact wafer flipping unit (option)
- Buffer station (option)
- Wafer ID reader (top/bottom – option)
- ESD control
- CE marking
- Semi S2/S8 compliance