Leonardo UVC Series
Fully automatic high-performance UV irradiation system designed to ensure maximum efficiency and uniformity for memory erasing or tape curing.
FEATURES
- High efficiency UV lamp with level measuring system and exposure time compensation
- Easy to use touch screen display
- Up to 4 UV Chambers
- 200 mm SMIF cassette opener (option)
- 300 mm load port (option)
- E84 full compliance
- SECS/GEM host communication full compliance
- Wafer ID reader (option)
- CE marking
- Semi S2/S8 compliance