Fully automated system to erase memories and EPROM’s on wafer

Fully servo controlled robot and arm lift

Highly flexible control system allows to change wafer size up to 8” with no hardware operations

Menu based operator interface with wafer program storage

Class 10 compatible (1 on request)

Mirror finished stainless steel body

High efficiency UV lamp with level measuring system and exposure time compensation

Handling throughput: 300 wfrs/h

CE safety features

Smallestfootprint

Signal tower for status identification

All function are directly accessible on very easy-to-use operator terminal with LCD display and keyboard

All machine functions are directly accessible

Operator identification with different password levels

Process parameters on production display

Optional printer kit with process and log report

Robot arm handling

Servo controlled step motor movements for arm and lift

No wafer prealignment required

Arm surface with special treatmen