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MWD Micol Wafer Dispenser
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MWE 200 Plus 6"- 8"
MWE 300 8"- 12"
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MWD Micol Wafer Dispenser
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MWD Micol Wafer Dispenser
Features

Fully automated system loading 4", 5", 6" wafers without any mechanical setting on standard microscopes

Flat alignment not required

Beltless transportation, low particle generation through minimal handling

Wafers are automatically returned to the original slot

All functions are easily programmable by control panel and readable on LCD

Smallest footprint

Best ratio price/features

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Transport System

Beltless transportation

Only one robotic arm moves wafers from Std cassette to vacuum chuck

Vacuum chuck rotating 360°

Less than 3 secs for transportation cycle

Soft controlled touch of the wafer by robotic arm

Teflon coated robotic arm

Control Panel (soft touch)

With digital display LCD allows the following functions:

Wafer table program
Used by the engineer to define an inspection cycle on 25 wafers. The operator will use as standard inspection "automatic program".

Automatic program
Used by the operatorfor inspection purposes.

Manual program
Used by the operator to modify the Std "automatic program", for special inspection purposes.

Diagnostic program
Used by the technician to set-up, calibrate and check system.

Display message
For machine status control, programmed inspection, alarm messages, etc.

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SPECIFICATIONS
POWER AC 110/220 V - 50 Hz - 150 VA
VACUUM 100 Torr
WEIGHT 13 Kg
SIZE 530 mm (L) - 300 mm (W) - 245 mm (H)
WAFER SIZE

4", 5", 6" wAFER WITHOUT ANY SETTING

CHUCK Vacuum assisted - rotating 360°
WAFER CARRIER 25 slots std 3/16" pitch cassette
WAFER TRANSPORT CYCLE less than 3 secs
TRANSFERT SYSTEM Teflon coated robotic arm
REJECT WAFER Manually by "fault switch button"

OPTIONS
REMOTE ORIENTATION FLAT UNIT 4", 5", 6" Wafer
PROGRAM EXTENSION Customer can define 5 differents programs of inspection that will be located in the "not volatile" memory of the systems