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Mini Environment EFEM System 
 Photopolymer Film Lamination
 DIE Attach Film Lamination
 Metal Lift Off
 BG & Temporary Bonding
 Film Lamination
 UV Curing Systems
 Wafer Handling &
 Inspection Systems
MMI 200
MWD 4 "- 6 "
Mini Environment EFEM System
 Multiaxis Robots
 Custom Products

   
Mini Environment EFEM System

Mini Environment EFEM System
Features

Microcontrol EFEM, Equipment Front End Module, is an interface that can be integrated with any process equipment

Completely built and assemblied by Microcontrol Electronic Italy

Easy and cost effective software interface

Thanks to the action of HEPA or ULPA filters keeps 300 mm wafer at the same

cleanliness inside FOUP

Supplied with a reliable mapping system and contactless centering and aligning station

MICROCONTROL ELECTRONIC SRL- VIA GIUBA 11 - 20132 MILANO - CF e PI 08872790152 - Cap.sociale Euro 10.400,00 i.v.