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| Process station |
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| 300 mm load ports |
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| Photopolymer Lamination |
| SYSTEM SPECIFICATIONS |
| WAFER SIZE |
8” - 12” |
| THROUGHPUT |
Process linked 50 wfrs/h |
| CENTERING / ALIGNMENT |
CONTACLESS VISION SYSTEM |
| TAPE COMPATIBILITY |
ALL KIND OF PHOTOPOLYMER FILMS |
| MINIMUM TAPE WIDTH |
8” - 215 mm
12” - 315 mm |
| N° of 12 ” WAFERS WITH 100m ROLL |
up to 320 wfrs |
| FOOT PRINT |
less than 2m2 |
| CE marking |
Full compliance |
| SEMI Standard |
Full compliance |
| SECS-GEM full compliance |
Option |
| WAFER ID / CASSETTE ID |
Option OCR - DOT matrix - BCR |
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System appearance and specifications are subject to change
without prior notice
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