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Leonardo 200
Adobe® Acrobat® document - 272 Kb |
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| Leonardo 200 |
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| Process station |
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| Loading station |
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| Photopolymer Lamination |
| SYSTEM SPECIFICATIONS |
| WAFER SIZE |
Up to 8” |
| THROUGHPUT |
Process linked (average of
60 wfrs/h) |
| CENTERING / ALIGNMENT |
CONTACLESS VISION SYSTEM |
| TAPE COMPATIBILITY |
ALL KIND OF PHOTOPOLYMER FILMS |
| MINIMUM TAPE WIDTH |
6” - 165 mm
8” - 215 mm |
| N° of 8” WAFERS WITH 100m ROLL |
Up to 470 wfrs |
| FOOT PRINT |
1 m2 |
| CE marking |
Full compliance |
| SEMI Standard |
Full compliance |
| SECS-GEM full compliance |
Option |
| WAFER ID / CASSETTE ID |
Option OCR - DOT matrix - BCR |
| SMIF SYSTEM |
Option |
| M.T.B.F. |
550 hrs |
| M.T.T.R. |
1hr |
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| Cover sheet removal system |
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| Cover Sheet Removal |
| SYSTEM SPECIFICATIONS |
| WAFER SIZE |
Up to 8” |
| THROUGHPUT |
90 wfrs/h |
| TRANSPORT |
ROBOT ARM |
| TAPE COMPATIBILITY |
25 mm wide ÷ 100 mm wide |
| FOOT PRINT |
1 m2 |
| CE marking |
Full compliance |
| SEMI Standard |
Full compliance |
| SECS-GEM full compliance |
Option |
| WAFER ID / CASSETTE ID |
Option OCR - DOT matrix - BCR |
| SMIF SYSTEM |
Option |
| M.T.B.F. |
550 hrs |
| M.T.T.R. |
1hr |
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