 |
| 812
Series 8"-
12" Taper/Detaper |
|
Lowest
cost of ownership through “ total gap control”
software fully adjustable
gap between wafers
=
lowest tape consumption
Ultra thin wafers processing:
our special zero force lamination
technology eliminates extra bow
due to tape tension on wafers
Our unique taping roller allows to perfectly
process very high bumped wafers |
Ultra thin wafer detaping
with our special chuck
Fully adjustable software and
mechanical detaping process |
|
 |
| Taping
Station |
|
| 812 Series TAPER |
| SYSTEM SPECIFICATIONS |
| WAFER SIZE |
8” - 12" |
| THROUGHPUT |
Process linked 90 wfrs/hr |
| CENTERING / ALIGNMENT |
CONTACLESS VISION SYSTEM |
| TAPE COMPATIBILITY |
ALL KIND OF TAPES |
| MINIMUM TAPE WIDTH |
8” 215mm
12” 315mm |
| N° of 8” WAFERS WITH 100m ROLL |
8" 470 Wfrs - 12" 320
Wfrs |
| FOOT PRINT |
1,9m2 |
| CE marking |
Full compliance |
| SEMI Standard |
Full compliance |
| SECS-GEM full compliance |
Option |
| WAFER ID / CASSETTE ID |
Option OCR - DOT matrix - BCR |
| |
|
System appearance and specifications are subject to change
without prior notice
|
 |
| Detaping
Station |
|
| 812 Series
DETAPER |
| SYSTEM SPECIFICATIONS |
| WAFER SIZE |
8” - 12" |
| THROUGHPUT |
Process linked 100 wfrs/hr |
| CENTERING / ALIGNMENT |
CONTACLESS VISION SYSTEM |
| TAPE COMPATIBILITY |
ALL KIND OF TAPES |
| FOOT PRINT |
1,9m2 |
| CE marking |
Full compliance |
| SEMI Standard |
Full compliance |
| SECS-GEM full compliance |
Option |
| WAFER ID / CASSETTE ID |
Option OCR - DOT matrix - BCR |
| UV Station |
Option |
| |
|
System appearance and specifications are subject to change
without prior notice
|
 |
| 300 mm Load Ports |
|
 |
Robot
with Carbon Fiber Handler
|
|
 |
| UV
Station |
|
